Posted to News on 24th Aug 2011, 23:21
AVS1000 micropositioning vertical lift has 135kg payload
Aerotech is introducing the AVS1000 micropositioning vertical lift for precise sub-micron vertical positioning of large and heavy loads for semiconductor manufacture, automated tool alignment, vision inspection and laser micromachining.
With a working height of just 140mm, the low-profile moving-wedge design features a servomotor-driven precision ball screw with heavy-duty linear motion guide bearings and an overall footprint of 450mm x 500mm. Offering a significant performance improvement over traditional horizontal stages used for Z-axis positioning, loads can be centred directly over the bearing system and the straightness-of-travel characteristics guarantee exceptional tabletop flatness and overall high accuracy.
The AVS1000 features a large through aperture and is also suited to microscopy or imaging applications where an optical path needs to run completely through the stage or where workholding fixtures can be integrated beneath the top plate to maintain the low working height.
Load and travel
Aerotech says the new AVS1000 vertical lift stage has a 135kg centred payload capability and is available in a choice of 5mm or custom vertical travel ranges. With a positioning resolution of five nanometres from a 1000-line rotary encoder, the stage boasts a calibrated accuracy of better than +/-1.0micron and up to +/-0.5micron bidirectional repeatability.
The aluminium base material for the AVS1000 has a durable black anodised finish for the standard range, with alternative electroless nickel finish for ESD protection applications. A cleanroom-compatible version is also available, as well as vacuum-prepared versions for 10-3 or 10-6torr.
Each AVS1000 includes a NEMA 34 motor mounting for use with Aerotech's BMS series brushless and slotless servo motors for smooth cog-free motion. The 1000-line rotary encoder has a choice of line driver or amplified sine wave output to suit the customers resolution requirements.
These stages may be used individually or combined with Aerotech's linear X-Y, rotary and gonimetric stages for a complete multi-axis micropositioning system. AVS1000 stages can be supplied with standard precision or with Aerotech's HALAR accuracy standard where interferometer measured error correction for accuracy and repeatability is stored in the motion controller as a look-up table. Motion control systems include PC-based software-only or hardware-based rack- or desk-mount packages that combine with advanced motion commands that optimise performance, reduce commissioning times, increase throughput and enable higher-quality finished parts or test quality. A wide choice of programming options include RS-274 G-code, AeroBasic, IEC61131-3, Microsoft .NET Framework and LabVIEW for varying levels of advanced software and analytical functionality.
Follow the link for more information about the AVS1000 micropositioning vertical lift.
