Brochure includes guide to capacitive nanometrology sensors

The brochure presents PI's state-of-the-art sensor systems and also features a tutorial on single-plate and dual-plate capacitive sensors and an applications overview:

• Measuring Displacement with Nanometer Precision
• Nanopositioning/Closed-Loop Systems
• Parallel Metrology, High-Precision Multi-Axis Measurements
• Measuring Straightness and Flatness, Active Cross-Talk Compensation
• Out-of-Plane Measurement, Constant-Height Scans, Out-of-Round Measurement
• Tip/Tilt Measurement and Compensation
• Measuring Vibration, Flatness and Thickness
• Force Sensors with Micronewton Sensitivity
• Layer Thickness Measurement with Sub-Micron Accuracy

Capacitive sensors can be used with any kind of electrically conductive target to perform high-precision, non-contact measurements of geometric quantities representing displacement, separation, position, length or other linear dimension. These nanometrology sensors are said to combine superior resolution and linearity with very high bandwidth for dynamic measurements.

The brochure is available free of charge and can be ordered from PI. Alternatively, download the PDF brochure.

About PI

PI is an industry leader in ultra-precision motion control devices for nanoscale manufacturing, test and research applications. PI has been developing and manufacturing standard and custom precision products with piezoelectric and electromagnetic drives for over 35 years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality products and systems for OEMs and research. PI operates globally with eight subsidiaries and a total staff of over 450.