Posted to News on 19th Jun 2015, 11:24
Integrated, open-frame stages with high dynamic performance
Aerotech's PlanarDLA integrated, open-frame stages have high dynamics and exceptional geometric performance in a low-profile package. These stages are excellent for applications ranging from two-sided LED wafer processing where high dynamics and micrometer-level straightness are required, to quasi-static optical metrology where high accuracy and precise geometric performance are necessary.
The PlanarDLA XY design is optimised for applications where straightness and flatness of motion are critical. High-precision roller bearings, precision-machined surfaces, and non-contact, direct-drive linear motors driving through the axes' centre-of-stiffness result in a positioning stage with straightness to +/-0.5um and flatness to +/-1.25um.
Structural elements are optimised for high dynamics and high stiffness for demanding dynamic applications. The PlanarDLA achieves high servo bandwidths while at the same time maximising the clear aperture available and keeping the overall height to a minimum. The PlanarDLA enables high-throughput, high-accuracy processing with 2m/s velocities and 2'g' accelerations, resulting in superior process yield and a low total cost of ownership.
Superior direct-drive technology
At the heart of the PlanarDLA is Aerotech's proprietary direct-drive technology. This is said to allow for excellent performance compared with other competitive screw-based and linear motor designs; only non-contact, direct-drive technology offers high speed and accurate positioning coupled with maintenance-free operation and long service life.
PlanarDLA stages are available with one or two motors per axis, allowing optimisation of each axis for the specific application and process. With two motors, the resulting drive force acts through the centres of friction and stiffness for superior geometric performance and accuracy, while one motor per axis is the economical choice if high-throughput and the strictest positioning performance are not required.
The standard cable management system on the PlanarDLA is integrated into the stage and optimised for long life and performance. Several standard options are available for additional servo axes, air/vacuum lines for vacuum chucks, or other process pneumatics.
The PlanarDLA is available in three positioning performance options. High-performance -PLUS and -ULTRA options enable accuracies and straightness values to +/-500nm and orthogonality to 5urad.
Follow the link for more information about Aerotech's PlanarDLA integrated, open-frame stages.
