PI's micro size ultrasonic stages are easy to integrate

Due to their low power requirements, ultrasonic motors can also be integrated into mobile measuring and medical devices. With the U-521, PI has now added a compact linear stage to its portfolio with dimensions of 35×35×15mm, similar to the size of a matchbox. The compact design allows easy integration, even when space is limited. In addition to the high speed up to 200mm/sec, the low inertia (direct drive no rotating parts) allows for a very dynamic start-stop behavior with settling times in the milliseconds.

An integrated optical linear encoder provides position feedback with 100 nanometers resolution. Higher resolution versions are available for OEMs. Typical application fields can be found in industry and research, for example, automatic micromanipulation, positioning of samples or when adjusting optical components, such as objectives and camera lenses. Vacuum-compatible versions (to 10-6 hPa) are also available.

Two stages can be combined to an XY-setup - no need for an adapter plate. The linear stage is complemented by a number of miniaturised closed-loop rotary stages with diameters from 20 to 50mm.

A compact piezoceramic plate oscillates at 100s of kHz (inaudible to human ears). Each cycle transfers a nanometric displacement onto a ceramic runner coupled to the moving carriage. No energy is consumed at rest, no heat to be dissipated, and the servo jitter is eliminated.

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