Posted to News on 29th May 2015, 10:59
Z-Axis piezo nanopositioners for extreme precision applications
Aerotech QNP-Z series piezo nanopositioning stages join Aerotech's growing piezo stage family that includes the QNP-L linear and QNP-XY stages. The QNP-Z series provides the resolution, linearity, repeatability and high dynamics required for the most demanding applications, from microscopy to optics alignment. With resolution to 0.15nm, linearity to 0.007 per cent, and repeatability to 1nm, nanometer-level precision is assured. With high dynamics (resonant frequency and stiffness) users can achieve higher throughput in exacting processes. A variety of travels (100¼m to 600¼m), feedback options, and vacuum versions add to the exceptional versatility of this stage series.
QNP-Z piezo stages are guided by precision flexures that are optimised using finite element analysis. The resulting design offers outstanding stiffness and resonant frequency (up to 1050Hz) enabling high process throughput and fast closed-loop response. These stages have been designed to provide excellent geometric performance (straightness and angular errors) while at the same time minimising the overall stage package size.
All QNP piezo stages offer optional closed-loop feedback using a capacitive sensor design for sub-nanometer resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly, enabling superior accuracy and repeatability.
When coupled with Aerotech's Q-series controllers and drives, QNP piezo stages demonstrate sub-nanometer positioning resolution and in-position stability (jitter), and high-positioning bandwidth. Software options such as Aerotech's Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times.
Aerotech's QNP piezo stages are available with capacitance sensor feedback or without feedback (open-loop). Open-loop provides a cost-effective option for applications where compact size, high dynamics and sub-nanometer positioning resolution are required, but absolute positioning accuracy and repeatability are not required. Open-loop designs can also be used where the piezo position is controlled via an external feedback source (interferometer, vision system, photodetector, etc.).
Product features:
- Travel ranges from 100¼m to 600¼m
- High-precision, frictionless flexure guidance system
- Positioning resolution to 0.15nm, linearity to 0.007 per cent and repeatability to 1nm
- Open-loop and vacuum versions
Please follow the link for more information on the QNP-Z Z series piezo nanopositioning stages from Aerotech.
