Posted to News on 2nd Jul 2008, 10:43
Advice for vacuum-compatible control system design
Aerotech has updated and expanded the Vacuum Preparation section of its Engineering Reference tutorial. Available online at www.aerotech.com in HTML or PDF format, the section details important design considerations and recommendations for high-precision motion control systems in vacuum levels categorised from low vacuum (10-3Torr), through standard (10-6Torr) to high vacuum (10-8Torr).
The resource builds on Aerotech's considerable experience of vacuum-compatible precision motion platforms covering materials selection, surface finishing, minimising outgassing, and optimising lubrication. Detailed information is also available for servo motor design and magnetic field control for critical vacuum applications, as well as thermal management systems for heat removal from motors and bearings. Cable management systems utilising Teflon and PEEK materials are also featured.
Aerotech's Vacuum Preparation section combines with the company's Engineering Reference as an invaluable source of information for precision motion and positioning mechanics for automated high-throughput production and inspection systems.
Track record
Aerotech's long list of high-performance vacuum-compatible applications includes EUV lithography, scanning electron microscopy, ion beam profiling and implantation, E-beam inspection, satellite component testing and optical polishing.
As well as its extensive expertise, Aerotech also has clean room assembly facilities where all parts are thoroughly cleaned to remove contaminants and, after assembly, packaged in heat sealed particle-free bags. Component-level bake-out is also available where required. These measures ensure that the motion system is delivered in a fully serviceable condition and ready to install in the application with minimal delay. As all set-up parameters are also included and application optimised configuration files preloaded into the motion control system, product development timescales are reduced to a minimum, ensuring a low cost of ownership for the customer.
View the Vacuum Preparation section of its Engineering Reference tutorial at www.aerotech.com.
