Compact linear piezo actuators for nanopositioning

These actuators have no lubricants, are vacuum-compatible, non-magnetic and have millisecond responsiveness. All models are self-locking at rest, backlash-free, wear-free, compact (from 8 x 6 x 2mm) and cost-effective.

These products are also suitable for high-energy physics and high magnetic field applications, vacuum applications, high-temperature applications (up to +150degC), precision liquid dispensing, scanning microscopy, OCT and MRI.

PI offers three advanced types of ceramic, non-magnetic linear motor actuators. These are distinguished by force, travel range, and speed and precision. For travel ranges of less than 1mm, high forces and very rapid response (sub-millisecond is feasible) the Piezomove type flexure actuators are recommended. Unlimited travel ranges are provided by both the Piline ultrasonic motor actuators and Nexact and Nexline piezo stepping linear motor type actuators. While the faster ultrasonic motor actuators provide speeds to 800mm/s, the piezo stepping motor types feature higher resolution and force (up to 500N). The stepping type actuators offer a positional resolution of 30pm.

To complement the actuators, PI can supply a variety of controllers ranging from OEM boards to rack-mount systems as well as extensive software support.