Ensuring semiconductor quality by getting up close with KEYENCE

The all-in-one VHX-7000 Series digital microscope from KEYENCE obviates the need to buy several different microscopes and is highly cost-effective when compared to a scanning electron microscope. Also, the unit can be upgraded and customised, representing an investment in the future.

One significant issue for many R&D professionals working in the semiconductor sector is that existing microscopes tend not to possess the depth of field required to generate the extremely clear image that they need. Also, microscopes will often need to be connected to a separate camera and to external software in order to process the images and communicate the results.

In addition, R&D staff usually have to carry out preparation work before using several different microscopes – a 2D measurement microscope, a scanning electron microscope (SEM) and others. This preparation can be hugely time consuming and switching between microscopes can present logistical problems if the various microscopes are used by different teams in separate rooms.

Being the world's first 4K Digital Microscope in the world, the VHX-7000 Series is particularly suited to the semiconductor market and is said to surpass traditional lens-based microscopes that rely on eyepieces. Different stages, stands and optional features include the motorisation of axes and a range of optical lenses that can be added to the base model depending on the user’s requirements.

As well as its superior magnification of minute features (from 20x to 6000x), the KEYENCE unit has the ability to subtly shift the finely-tuned XY motorised stage automatically to increase resolution by 33%. The ‘stitching’ of several individual images function has been simplified due to the powerful on-board software with intelligent algorithms that are capable of evening out lighting and diffusing it over the inspected part.

Claire Lillywhite, applications engineer for the metrology and microscopy divisions at KEYENCE, says: “Whether looking to do checks on wafer bonding and packaging or carry out non-destructive final testing or a range of other R&D inspections, the semiconductor industry now has a solution to the many issues that have bedevilled it in the past."

Click for more information on the KEYENCE VHX-7000 Series digital microscope.