High-performance linear stage with absolute encoder and precision guiding

With 80nm bidirectional repeatability, 1g acceleration, and 500mm/s velocity, the V-573 family combines precision and speed for demanding production environments. Designed for XY configurations, the stages integrate seamlessly with PI's ACS-based EtherCAT motion controllers, leveraging advanced algorithms for optimal system performance.

The advanced stage design provides for excellent straightness and flatness values as low as 1um. Crossed roller bearings ensure high stiffness, smooth running, and extended lifetime. Their line-contact design minimises friction, improves accuracy, and supports higher loads, with an anti-creep mechanism for enhanced reliability.

Driven by non-cogging, 3-phase direct-drive linear motors, the stages deliver maintenance-free performance with smooth motion at high velocities and accelerations. Direct force transmission together with direct-measuring linear encoders eliminates backlash and play, while improving accuracy and bidirectional repeatability.

The V-573 is available with incremental or absolute encoders. Absolute encoder models offer 1nm resolution and immediate position feedback on power-up, eliminating referencing moves for efficient, safe startup.

Application areas include: sample inspection, precision micro-assembly and advanced research; semiconductor testing and inspection, and metrology; precision automation, device assembly, and laser micro-processing; high-speed pick-and-place, alignment of optics, micromechanics, and photonics components; biotechnology, microscopy, medical device manufacturing.