High-precision QA equipment for measurement & test applications

Simon Smith, European Director Aerotech says: "Control has been the most important trade fair event for us in the area of quality assurance for many years. Our "small' Hexapod HEX150 RC should had its world premiere here. Also our revolutionary Automation1 control platform we wanted to present."

Hexapod captivates with excellent precision mechanics. As a smaller brother, the HEX150 RC with a diameter of 150mm complements the existing product family with a diameter of 500 and 300mm. In addition to its commitment to quality assurance in measurement and testing technology, Aerotech also sees potential applications in the automotive, electronics, mechanical engineering and medical technology sectors.

The unmistakable advantage of the multi-axis, parallel kinematic hexapods is precise positioning freely in all directions. With a central movement distance of 135mm, this allows the multi-axis system to be used flexibly for a wide variety of applications, for example in measurement and testing technology. Simon Smith explains: "We have customers in practically all industries, with Control focusing on measurement technology and automation."

The 150 series hexapod with its high load-bearing capacity coupled with large movement distances and high positioning speeds of 50mm/s leaves nothing to be desired in the application specification. The high-precision positioning system impresses with its excellent mechanics: very stiff drive legs with brushless, slotless AC servo motors not only ensure ultimate performance and a long service life, but also maximum precision in the submicrometre range. The AC servo motors are connected directly to the ball bearing spindle, which guarantees high drive rigidity. According to Aerotech, the HEX150 RC is currently the most precise hexapod on the market.

Flexible positioning

With the IGM systems as an alternative to conventional positioning tables with a granite base, Aerotech has virtually redeveloped the positioning tables. The tailor-made IGM linear tables offer significantly higher rigidity with a reduced overall height and consequently more flexibility in construction. Depending on the application, travel, payload and dynamic performance can be specifically adapted. In an integrated granite motion system, machine components such as bearings, encoders and drives are attached directly to the granite structure and bridge structures. With conventional positioning tables, the positioning table and machine components are separate components. Different IGM versions with mechanical or air-bearing axles are available. It is driven by a ball screw or linear motor. Various feedback options from simple encoders to laser interferometers expand the application range of the positioning tables. Additional movement elements such as rotary axes, lifting devices, piezo nanopositioners or even galvanometers can be integrated into the IGM axes - all components can be controlled centrally via the A3200 machine control from Aerotech. If additional peripheral equipment has to be controlled, the new Automation1 control platform is recommended.

PlanarDL two-axis linear table

This two-axis linear table has an outstanding geometric performance (straightness up to +/-0.4 um; flatness up to +/-1 um). The integrated XY table with low profile is driven by a linear motor, has precision crossed roller bearings with a creep lock and is available in nine model versions depending on the travel distance and accuracy. Simon Smith explains: "Our linear tables from the PlanarDL series offer excellent geometric and dynamic performance in a compact package with a low profile." Due to the many different travel and performance options, the linear stage is suitable for a number of applications from surface measurement technology to wafer lithography. The integrated XY design shows its strengths particularly in applications where straightness and flatness are important. High-precision crossed roller bearings with anti-creep, precision-machined surfaces and linear motors from Aerotech with drive through the centre of stiffness of the axes lead to a positioning table with exceptionally good geometric tolerances. The components of the linear table have been optimised with a view to high dynamics and rigidity in order to meet the most demanding dynamic applications. In this way, speeds of 1m/s and accelerations of 1.5 g are achieved for high throughput and maximum accuracy.

Aerotech's experts from see its application in difficult scanning applications. Here, users can achieve excellent process results with a low total cost of ownership. The contactless and thus maintenance-free and durable direct drive enables precise positioning even at high speeds. Compared with spindle-based and linear motor designs from other manufacturers, the PlanarDL is of very high performance. The PlanarDL is supplied in three positioning performance versions. The available high-performance options -PLUS and -ULTRA offer accuracy and straightness values of up to +/-400 nm and a perpendicularity of up to 1 angular second.

Automation1 brings a new momentum to motion control and positioning systems. Aerotech develops motion control and positioning systems and associated software. These are used wherever high throughput with absolute precision is required, for example in laser material processing. Controlling movement components with high precision has been a core competence for decades. Aerotech products and systems are used in industry, in research institutions or in measurement technology, wherever something in the micro and nanometre range needs to be positioned with repeatable accuracy. With Automation1, the next control generation has now arrived after the AS3200. Anyone who uses an optimised control platform reduces the non-value added development effort and can sometimes supply their customers faster. Aerotech revolutionises precision motion and machine control with the "Automation1 Precision Machine and Motion Control Platform". It functions as a complete machine control system with all components and thus offers significantly more than just "motion control".

Equipped with a new software-based motion controller, servo and stepper motors, galvo scan heads, piezoelectric actuators and various other devices can be controlled directly. The individual axes are connected via the HyperWire bus, the most powerful communication bus in the motion control industry.

According to Aerotech, the new Automation1 platform supports today's growth markets for precision machinery and motion control, and is particularly well-suited for automation systems, precision laser processes, test and inspection processes, and other applications where process control is closely linked to motion control. Thus, the new control and drive development offers even greater optimisation potential for faster motion and settling times, better position stability and increased contour accuracy. It is thus the first motion control development environment that simultaneously puts years of user experience with the latest technology for precise and fast motion sequences into the forefront of product design.

For more information about any of the products mentioned above, go to www.aerotech.co.uk.