Posted to News on 2nd Aug 2013, 10:03
Integrated XY stage for high geometric and dynamic performance
Aerotech's PlanarDL-series stages offer excellent geometric and dynamic performance in a compact, low-profile and cost-effective package. Available in nine different travel and performance configurations, this stage is suitable for applications ranging from high-accuracy surface profilometry to high-speed semiconductor and LED wafer scribing.
With an optimised structure, components with exacting precision, Aerotech's own direct-drive motor technology and an integrated cable management system, the PlanarDL has excellent planar performance. The PlanarDL XY design allows for planar geometric performance in applications where straightness and flatness of motion are critical. High-precision, anti-creep crossed-roller bearings, precision-machined surfaces and Aerotech linear motors driving through the axes' centre-of-stiffness result in exceptional geometric tolerances.
PlanarDL structural elements are optimised for high dynamics and high stiffness for demanding dynamic applications. Capable of achieving 1m/s velocity and 1.5 'g' acceleration, the PlanarDL enables high-throughput, high-accuracy processing, resulting in superior process yield and a low total cost of ownership. Unlike competitive products using recirculating bearings, the anti-creep crossed-roller bearings used in this design are said to provide smooth motion suitable for challenging scanning applications.
Benefits of direct-drive linear motors
Non-contact, direct-drive technology offers the advantages of high-speed and accurate positioning, coupled with maintenance-free operation and long service life. At the heart of the PlanarDL is Aerotech's proprietary direct-drive technology that the company says delivers superior performance compared with competitive screw-based and linear-motor designs.
PlanarDL-200XY and -300XY stages are both available with one or two motors per axis, allowing optimisation of each individual axis for the specific application and process parameters. Regardless of the number of motors selected, the resulting drive force acts through the centres of friction and stiffness, resulting in superior geometric performance and accuracy.
The cable management system on the PlanarDL is integrated into the stage and optimised for long life and performance. Additional standard options are available for extra servo axes or air/vacuum lines for vacuum chucks or other process pneumatics.
There are three positioning performance options available for the PlanarDL: -BASE, -PLUS and -ULTRA. Relying on decades of experience in system-level design including not only positioning mechanics, but also software and electronics, Aerotech has developed advanced technologies to push the envelope of precision. High-performance -PLUS and -ULTRA options are available to enable accuracies and straightness values down to +/-400nm and orthogonality down to 1 arc-second.
Product summary:
- Integrated, low-profile, XY, linear-motor stage
- Excellent geometric performance (straightness to +/-0.4 um; flatness to +/-1 um)
- Anti-creep, precision crossed-roller bearings
- Large selection - nine models in travel and accuracy
Follow the link for more information about the PlanarDL-series stages or email [email protected].
