Linear piezo nanopositioners for many applications

The QNP-L linear piezo stages are guided by precision flexures optimised using finite element analysis to ensure high stiffness and long life. This design promises best-in-class stiffness and resonant frequency for high-process throughput and fast closed-loop response. The design also provides excellent geometric performance (straightness and angular errors) while minimising overall stage package size.

All QNP-L piezo stages offer closed-loop feedback using a capacitive sensor design that yields sub-nanometre positioning resolution and high positioning accuracy (linearity). The capacitive sensors directly measure the output of the positioning carriage, enabling superior linearity and positioning repeatability when compared with indirect feedback metrology techniques such as strain-gage feedback.

When coupled with Aerotech's Q-series controllers and drives, QNP-L piezo nanopositioning stages demonstrate sub-nanometre positioning resolution and in-position stability (jitter), and high-positioning bandwidth. Aerotech's Dynamic Controls Toolbox and Motion Designer software packages provide advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. Automatic parameter and calibration identification is accomplished with Aerotech's FlashConfig feature. The stage is automatically identified and all operational parameters including axis calibration data are uploaded into the controller ensuring safe, accurate, and "plug-and-play' operation.

Design flexibility

Aerotech's QNP-L piezo stages are available with capacitive sensor feedback or without feedback (open-loop). An optional mounting plate provides direct mounting to English or metric breadboard optical tables. Common travels of the X, XY, and Z stages mount together without adapter plates. All QNP piezo stages are available in vacuum-prepared versions upon request.

Product summary:

• Travel ranges from 100 um to 600 um available
• Long device lifetime
• High-precision, frictionless flexure guidance system
• Superior positioning resolution and linearity to 0.007 per cent with direct-metrology capacitive sensor options
• Mounting compatibility with other QNP-series piezo nanopositioners
• Open-loop and vacuum versions

For further information, please email [email protected], or follow the link to view the QNP-L series data sheet.