Posted to News on 27th May 2010, 15:22
New direct-drive rotary and linear nanopositioning stages
Aerotech is adding two new rotary and two new vertical translation variants to its recently launched range of single-axis and dual X-Y axis ANT series linear nanopositioning stages. These are part of Aerotech's nano Motion Technology (nMT) range.
With Aerotech's direct-drive ANT series now covering 95mm and 130mm wide linear and vertical-linear translation stages, in addition to rotary and goniometric angular positioners, users can now specify long travel range, multi-axis nanometre-resolution mechanics for high-throughput production and demanding test and research applications. The new stages complement the outstanding precision, nanometre-precision and high dynamic performance offered by the nMT range.
The new ANT95-R and ANT130-R rotary stages comprise 95mm and 130mm diameter models with a positioning resolution of 0.1 arc sec and a calibrated repeatability of just 2 arc sec. They both utilise Aerotech's specialised direct-drive motor technology for extremely smooth motion with in-position stability to within just 0.5 arc sec. Both sizes are available in angular travel ranges of 20, 180 or continuous 360-degree rotation, and maximum speed and acceleration for the latter is up to 200rpm and 400rad/sec2, respectively. Direct axial load capacity is 2kg for the smaller diameter stage and 3kg for the larger stage. The error motion performance across both sizes of rotary stage (tilt, axial and radial) is in line with the outstanding overall specifications and suited to demanding high-throughput manufacturing applications such as disk-drive fabrication, fibre optic device alignment, and MEMS sensor manufacture and test.
Vertical stages
Aerotech's nMT range has been further enhanced with the ANT95-L-Z and ANT130-L-Z series vertical stages that have nominal widths of 95mm and 135mm, respectively, and a calibrated positioning resolution of just 2 nanometres. Supplied complete with vertical mounting angle brackets and integral pneumatic counterbalance mechanisms, the ANT95-L-Z is available in vertical travel ranges of 25mm and 50mm, while the ANT-130-L-Z offers 35mm and 60mm of travel. Within each travel range a high-performance -PLUS option is available that increases the repeatability by a factor of around 30 per cent; for the ANT95-L-Z-PLUS this yields a bidirectional repeatability of +/-75nm.
The design of these new vertical translation stages is derived from the single-axis and X-Y linear ANT stages with anti-creep cross-roller bearings and a centre-driven brushless, non-cogging linear servomotor for ultra-smooth performance characteristics and in-position stability of just a few nanometres when driven by Aerotech's ultra-low-noise linear stage amplifiers. Aerotech's specially developed 40MHz linear encoder processing ensures such high resolution and, together, these features ensure a dynamic performance and precision that is said to be much improved over traditional lead screw-driven stages or ceramic motor types. The overall speed and acceleration performance of the new vertical stages is up to 200mm/s and 1 'g' - which though not as high-performing as their horizontal plane linear positioning counterparts at 500mm/s and 5 'g' are still eminently suited to high-throughput production and test applications.
All ANT series stages are protected with a durable black hardcoat finish, and exceptionally long working life and low maintenance is ensured by means of the non-contacting direct-drive linear and rotary motor technology and non-contacting optical encoders.
Motion control
The exceptionally high performance specifications for the ANT range are in part attributed to the advanced motion control and drive technologies available as a part of complete motion systems from Aerotech. With all cabling included and with fully assembled stages that are thoroughly tested and calibrated in Aerotech's clean room facilities, complete systems can encompass custom-designed machine frames with highly stable granite base and gantries to support customer-supplied equipment such as lasers or metrology apparatus. Aerotech's advanced motion controls include algorithms, data acquisition and analysis tools that counteract the minute disturbances that influence positioning stability and dynamic performance at sub micron levels and optimise overall performance.
Motion control options include the software-only A3200 Automation Platform with DSP based Npaq drives or the Ensemble series rack or desktop system for multi-axis positioning systems, while the Soloist series is suited to demanding single-axis applications. Servo drive technologies include PWM amplifier stages for high dynamic performance in addition to wide bandwidth, and ultra-low-noise linear servo amplifiers for best in-position stability and lowest jitter performance.
Aerotech motion controllers also feature advanced software commands that are designed to simplify interfacing with customers' own systems such as the PSO command that synchronises laser firing with real-time position. Comprehensive analogue and digital I/O and GUIs are also available, along with a broad choice of diagnostic, set-up and programming tools for fast and trouble-free system commissioning. Supported programming languages include AeroBASICTM, Visual Basic C, and C++ with optional advanced application support covering Windows based ActiveX components and .NET class libraries.
