New high-speed, low-power mass spectrometer

The 830 VQM incorporates the latest state of the art in mass separation, being based on patented electrostatic ion trap technology. It is much smaller than existing RGA instruments and is claimed to be 15 times faster while requiring five times less power than legacy quadruple or mass sector technologies. The electrostatic ion trap accurately represents low mass range gases such as helium and hydrogen with no quadruple zero blast issues, and its ultra-fast performance advantage increases at lower pressures.

This high-quality, high-speed, low-power mass spectrometer has applications mainly in the semiconductor manufacturing industry, but it is also suitable for areas where manufacturing processes are conducted in a vacuum.