New high-speed XYZ nanopositioning and scanning system

Using a parallel-kinematics design (in which a common moving platform is used for X, Y and Z motion) reduces the moved mass and this feature, together with the stiff design, is said to enable higher operating speeds to be used than other piezo scanning stages. A parallel metrology position sensor design provides highly accurate position information in all axes.

Indeed, parallel metrology with non-contact capacitive sensors enables resolutions of 0.1nm to be achieved, and the frictionless, lightweight flexure design is capable of sub-millisecond response times. Long-Life piezo actuators are used to give a travel range of 100x100x10um, and linearity is up to 99.99 per cent.