Posted to News on 15th Apr 2010, 09:24
New RF generator features dual high-frequency sections
Megatech is launching the Comdel CDX RF generator, which is described as an affordable, high-quality RF power supply with dual high-frequency sections. Manufactured by USA-based Comdel, this innovative unit is available in 1200W and 2000W ratings, which gives more flexibility for plasma applications including bias, etch, deposition and ashing in semiconductor processing, as well as solar cell and photovoltaic applications.
The high-frequency (HF) section can provide 600 or 1000W of power (for the CDX 1000 and CDX 2000 models, respectively), with optional frequencies from 2-60MHz. The low-frequency (LF) section can deliver 600 or 1000W, with an optional fixed or variable frequency of 13.56MHz.
Features include controls that are easy to use and see, a range of three-phase AC input voltages at 50/60Hz, and analogue setpoint and readback levels are 0-10V DC for 0-100 per cent rated power. Control signal input impedance is 100kohm minimum, with output power control linearity of two per cent or better. The load mismatch is limited to 200W under high VSWR conditions, while line regulation is +/-1 per cent output change over 187-229V AC line voltage.
Constructed from high-quality materials, the CDX measures 178 x 483 x 483mm and weighs 44kg.
For further information please contact Peter White of Megatech on +44 (0)1543 500044 or e-mail [email protected].
