Posted to News on 2nd Apr 2015, 10:51
Technologically advanced silicon carbide XY air-bearing stage
Aerotech has developed the PlanarHDX, the most advanced commercially available planar air-bearing platform available. The PlanarHDX was designed using an FEA-optimised silicon carbide structure and optimised air-bearing compensation techniques to provide high dynamic performance while maintaining excellent geometric characteristics and positioning accuracy.
PlanarHDX structural elements were designed using an advanced silicon carbide ceramic with a specific stiffness (elastic modulus/density) five times higher than aluminium and a coefficient of thermal expansion approximately five times lower. The resulting material and FEA-optimised structure enable 1.5m/s scan speeds and 5g peak acceleration with a payload of up to 20kg for very high throughput processing - without sacrificing dynamic tracking, geometric performance, or thermal stability.
Other design enhancements include a new air-bearing compensation strategy that increases stiffness and load capacity for demanding high-dynamic applications. Using proven air-on-air preloading in critical bearing elements improves turnaround and settling times over vacuum-preloaded designs. A proprietary reaction-mass design reduces stage-induced forces in the step-axis that are transferred to the isolation system or customer's structure (optics, sensors, etc.). By minimising these dynamic forces, move-and-settle time is reduced and process throughput is increased.
The PlanarHDX is available with passive or active isolation systems. Additional axes such as Z-tip-tilt or Z-theta designs as well as custom wafer load/unload mechanisms and wafer chucks are available. Machine weldments, complex granite base structures, or enclosures can also be provided. Feedback options include low-expansion glass scale encoders or interferometer.
Many advanced control features such as Directional Gain Scheduling, Iterative Learning Control, and Harmonic Cancellation are available to easily, quickly, and efficiently optimise your installation. Aerotech's ETM (Enhanced Throughput Module) option helps improve the positioning performance of high-dynamic motion systems by directly measuring and compensating for the unwanted motion of the machine base.
Follow the link for more information on the PlanarHDX planar air-bearing platform.
