White light interferometer offers nanometre-accurate measurements of transparent thin layers
Posted to News on 20th Nov 2025, 11:00

White light interferometer offers nanometre-accurate measurements of transparent thin layers

Precision sensor manufacturer Micro-Epsilon has further developed its interferoMETER range of white light interferometers to include a system designed for non-contact, high precision, high speed thickness measurement of thin transparent single layers and multi-layer coatings.

White light interferometer offers nanometre-accurate measurements of transparent thin layers

This further expands the range of potential applications in the semiconductor, metal processing and packaging industries.

With a measuring rate up to 24 kHz, the new interferoMETER IMS5200-TH is designed for fast, high precision inline thickness measurements. It measures layer thicknesses from 1 um to 100 um with nanometre precision and with excellent linearity of < +/- 100 nm. In addition, multi-peak measurement of up to five thin film layers is possible. xtagstartz/p>

Want the latest machine building news straight to your inbox? Become a MachineBuilding member for free today >>


Micro Epsilon UK Limited

No. 1 Shorelines Building
Shore Road
CH41 1AU
UNITED KINGDOM

+44 (0)151 355 6070

Pilz Automation Technology Mechan Controls Ltd Control Technologies UK Ltd Lenze Ltd ABSSAC Ltd AutomateUK Smartscan Ltd STOBER Drives Ltd Micro Epsilon UK Limited Kawasaki Robotics (UK) Ltd Heidenhain GB Ltd Telemecanique Sensors Aerotech Ltd Energy Efficient Drive Systems Ltd