XY piezo nanopositioning and scanning stage provides more travel
Posted to News on 4th Jul 2016, 12:10

XY piezo nanopositioning and scanning stage provides more travel

Applications in micro-assembly, beam guidance, photonics, and optical metrology all require nanometer adjustment precision, most times in very compact spaces. To meet those requirements, PI is introducing its newest XY piezo motor positioners - P-620.2 to P-629.2 - to join the existing PIHera family of over 60 compact, direct metrology stages available in a large variety of travel ranges.

XY piezo nanopositioning and scanning stage provides more travel

Flexure-guided piezo positioning stages are advantageous when compared with classical mechanical bearing-driven motorised systems due to vibrationless motion, virtually unlimited resolution, and fast response. With the exclusion of rolling elements, there is no bearing rumble to affect the uniformity or straightness of motion. PIHera precision closed-loop XY-stages are equipped with absolute-measuring direct-metrology capacitance sensors and provide resolution down to 0.1nm, in a compact, FEA-optimised package for high stiffness and long lifetime. Direct metrology provides higher stability and linearity compared with inferred metrology feedback - usually based on piezo resistive strain gauges, a technique also available from PI for entry-level piezo nanopositioners. Cost effective, positioning accuracy of 0.02 per cent, and optional vacuum compatibility make these compact stages well suited for applications that require frictionless, vibration-free, positioning with high linearity.

Driven by PI's proprietary PICMA piezo ceramics (tested by NASA/JPL for 100 billion cycles and employed on the Mars Rover), PIHera piezo stages have useful properties especially important in long-term research and industrial applications, including temperature tolerance range of -20 to 80degC.

Follow the link for specifications, datasheets and more information about the new XY piezo motor positioners from PI.


PI (Physik Instrumente) Ltd

Trent House, University Way
Cranfield Technology Park
MK43 0AN
UNITED KINGDOM

+44 (0)1234 756360

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